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Structural and Photoluminescence Properties of ZnO Films Grown on 6H-SiC Substrates by Low-Temperature Atomic Layer Deposition
Lin, Ming-Chih, Wu, Mong-Kai, Yuan, Kai-Yun, Chen, Miin-Jang, Yang, Jer-Ren, Shiojiri, MakotoVolume:
158
Year:
2011
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/2.031112jes
File:
PDF, 230 KB
english, 2011