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Finite Element Model of Surface Acoustic Wave Method for Mechanical Characterization of Patterned Thin Films of the Ultra-Large Scaled Integrated Interconnect
Xiao, Xia, Shan, Xingmeng, Tao, Ye, Sun, Yuan, Kikkawa, TakamaroVolume:
13
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2013.6092
Date:
February, 2013
File:
PDF, 2.36 MB
english, 2013