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Anomalous oxygen precipitation near the vacancy and interstitial boundary in CZ-Si wafers
Don-Ha Hwang, Bo-Young Lee, Hak-Do Yoo, Oh-Jong KwonVolume:
213
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0022-0248(00)00318-3
File:
PDF, 454 KB
english, 2000