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Reduced damage of electron cyclotron resonance etching by In doping into p-GaN
Toshiki Makimoto, Kazuhide Kumakura, Naoki KobayashiVolume:
221
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0022-0248(00)00712-0
File:
PDF, 382 KB
english, 2000