Thermodynamics on halide vapor-phase epitaxy of InN using InCl and InCl3
Yoshinao Kumagai, Kikurou Takemoto, Akinori Koukitu, Hisashi SekiVolume:
222
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0022-0248(00)00932-5
File:
PDF, 246 KB
english, 2001