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Growth of oriented BN films prepared by electron cyclotron resonance CVD
Shengjun Zhang, Guanghua Chen, Bo Wang, Dexue Zhang, Hui YanVolume:
223
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0022-0248(01)00679-0
File:
PDF, 162 KB
english, 2001