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Quasi-thermodynamic model of SiGe epitaxial growth
A.S. Segal, S.Yu. Karpov, A.P. Sid’ko, Yu.N. MakarovVolume:
225
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0022-0248(01)00848-x
File:
PDF, 176 KB
english, 2001