Virtual reactor as a new tool for modeling and optimization of SiC bulk crystal growth
M.V. Bogdanov, A.O. Galyukov, S.Yu. Karpov, A.V. Kulik, S.K. Kochuguev, D.Kh. Ofengeim, A.V. Tsiryulnikov, M.S. Ramm, A.I. Zhmakin, Yu.N. MakarovVolume:
225
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0022-0248(01)00879-x
File:
PDF, 197 KB
english, 2001