Enhanced bulk polysilicon production using silicon tubes

Enhanced bulk polysilicon production using silicon tubes

Ijaz Jafri, Mohan Chandra, Hui Zhang, Vish Prasad, Chandra Reddy, Carmela Amato-Wierda, Marc Landry, Ted Ciszek
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Volume:
225
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0022-0248(01)00905-8
File:
PDF, 233 KB
english, 2001
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