Enhanced bulk polysilicon production using silicon tubes
Ijaz Jafri, Mohan Chandra, Hui Zhang, Vish Prasad, Chandra Reddy, Carmela Amato-Wierda, Marc Landry, Ted CiszekVolume:
225
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0022-0248(01)00905-8
File:
PDF, 233 KB
english, 2001