GaAs-on-silicon conformal vapor-phase epitaxy using...

Journal of Crystal Growth 2001 Vol. 225; Iss. 2-4

GaAs-on-silicon conformal vapor-phase epitaxy using reversible transport and selective etching reactions with water vapour

Michael G. Mauk, Bryan W. Feyock, Jeffrey E. Cotter
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Volume:
225
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0022-0248(01)00947-2
File:
PDF, 235 KB
english, 2001
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