Silicon crystals for future requirements of 300 mm wafers
E Dornberger, J Virbulis, B Hanna, R Hoelzl, E Daub, W von AmmonVolume:
229
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0022-0248(01)01041-7
File:
PDF, 249 KB
english, 2001