AlN epitaxial growth on off-angle R-plane sapphire...

Journal of Crystal Growth 2001 Vol. 229; Iss. 1-4

AlN epitaxial growth on off-angle R-plane sapphire substrates by MOCVD

Tomohiko Shibata, Keiichiro Asai, Yukinori Nakamura, Mitsuhiro Tanaka, Kazuyuki Kaigawa, Junko Shibata, Hiroaki Sakai
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Volume:
229
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0022-0248(01)01051-x
File:
PDF, 360 KB
english, 2001
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