The impact of nitrogen on the defect aggregation in silicon

The impact of nitrogen on the defect aggregation in silicon

W. von Ammon, R. Hölzl, J. Virbulis, E. Dornberger, R. Schmolke, D. Gräf
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Volume:
226
Year:
2001
Language:
english
Pages:
12
DOI:
10.1016/s0022-0248(01)01277-5
File:
PDF, 270 KB
english, 2001
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