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The impact of nitrogen on the defect aggregation in silicon
W. von Ammon, R. Hölzl, J. Virbulis, E. Dornberger, R. Schmolke, D. GräfVolume:
226
Year:
2001
Language:
english
Pages:
12
DOI:
10.1016/s0022-0248(01)01277-5
File:
PDF, 270 KB
english, 2001