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Formation of large-grained uniform poly-Si films on glass at low temperature
Armin G. Aberle, Nils-Peter Harder, Stefan OeltingVolume:
226
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0022-0248(01)01379-3
File:
PDF, 205 KB
english, 2001