Atomic layer deposition of zirconium oxide from zirconium...

Journal of Crystal Growth 2001 Vol. 231; Iss. 1-2

Atomic layer deposition of zirconium oxide from zirconium tetraiodide, water and hydrogen peroxide

Kaupo Kukli, Katarina Forsgren, Jaan Aarik, Teet Uustare, Aleks Aidla, Antti Niskanen, Mikko Ritala, Markku Leskelä, Anders Hårsta
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Volume:
231
Year:
2001
Language:
english
Pages:
11
DOI:
10.1016/s0022-0248(01)01449-x
File:
PDF, 245 KB
english, 2001
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