Evaluation of NF3 versus dimethylhydrazine as N sources for...

Evaluation of NF3 versus dimethylhydrazine as N sources for GaAsN

Sarah Kurtz, R. Reedy, B. Keyes, Greg D. Barber, J.F. Geisz, D.J. Friedman, W.E. McMahon, J.M. Olson
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Volume:
234
Year:
2002
Language:
english
Pages:
4
DOI:
10.1016/s0022-0248(01)01712-2
File:
PDF, 90 KB
english, 2002
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