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Atomic layer deposition of ZnS thin films based on diethyl zinc and hydrogen sulfide
Gert Stuyven, Patrick De Visschere, Andriy Hikavyy, Kristiaan NeytsVolume:
234
Year:
2002
Language:
english
Pages:
9
DOI:
10.1016/s0022-0248(01)01759-6
File:
PDF, 169 KB
english, 2002