Ion damage overrides structural disorder in silicon surface nanopatterning by low-energy ion beam sputtering
Moreno-Barrado, A., Gago, R., Redondo-Cubero, A., Vázquez, L., Muñoz-García, J., Cuerno, R., Lorenz, K., Castro, M.Volume:
109
Language:
english
Journal:
EPL (Europhysics Letters)
DOI:
10.1209/0295-5075/109/48003
Date:
February, 2015
File:
PDF, 910 KB
english, 2015