Adsorption, diffusion and desorption of Cl atoms on Si(1 1 1) surfaces
S. Sakurai, T. NakayamaVolume:
237-239
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0022-0248(01)01904-2
File:
PDF, 218 KB
english, 2002