Ordering and self-organized growth of Si in the Si/SiO2...

Ordering and self-organized growth of Si in the Si/SiO2 superlattice system

D.J. Lockwood, G.F. Grom, P.M. Fauchet, L. Tsybeskov
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Volume:
237-239
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0022-0248(01)02213-8
File:
PDF, 261 KB
english, 2002
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