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In situ observation of reflection high-energy electron diffraction during the initial growth of SiC on Si using dimethylsilane
Kanji Yasui, Yuzuru Narita, Toshikazu Inubushi, Tadashi AkahaneVolume:
237-239
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0022-0248(01)02231-x
File:
PDF, 210 KB
english, 2002