![](/img/cover-not-exists.png)
Collision processes between sputtered particles on high speed rotating substrate and atomic mass dependence of sticking coefficient
Kozo Obara, Zixun Fu, Masahiro Arima, Takeshi Yamada, Takashi Fujikawa, Nariaki Imamura, Norio TeradaVolume:
237-239
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0022-0248(01)02306-5
File:
PDF, 164 KB
english, 2002