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Numerical study of 3D unsteady melt convection during industrial-scale CZ Si-crystal growth
I.Yu. Evstratov, V.V. Kalaev, A.I. Zhmakin, Yu.N. Makarov, A.G. Abramov, N.G. Ivanov, A.B. Korsakov, E.M. Smirnov, E. Dornberger, J. Virbulis, E. Tomzig, W. von AmmonVolume:
237-239
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0022-0248(01)02327-2
File:
PDF, 288 KB
english, 2002