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Cracking assisted nucleation in chemical vapor deposition of silicon nanoparticles on silicon dioxide
W.Thomas Leach, Jianhong Zhu, John G. EkerdtVolume:
240
Year:
2002
Language:
english
Pages:
8
DOI:
10.1016/s0022-0248(02)01076-x
File:
PDF, 257 KB
english, 2002