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Effect of NH3 on the growth characterization of TiN films at low temperature
H.H. Huang, M.H. Hon, M.C. WangVolume:
240
Year:
2002
Language:
english
Pages:
8
DOI:
10.1016/s0022-0248(02)01081-3
File:
PDF, 406 KB
english, 2002