Growth of AlGaN epilayers related gas-phase reactions using...

Journal of Crystal Growth 2002 Vol. 245; Iss. 3-4

Growth of AlGaN epilayers related gas-phase reactions using TPIS-MOCVD

Sunwoon Kim, Junho Seo, Kyuhan Lee, Haeseok Lee, Keunseop Park, Younghoon Kim, Chang-Soo Kim
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Volume:
245
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0022-0248(02)01732-3
File:
PDF, 442 KB
english, 2002
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