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Gas flow effect on global heat transport and melt convection in Czochralski silicon growth
V.V. Kalaev, I.Yu. Evstratov, Yu.N. MakarovVolume:
249
Year:
2003
Language:
english
Pages:
13
DOI:
10.1016/s0022-0248(02)02109-7
File:
PDF, 547 KB
english, 2003