Surface morphology and crystallinity control in the atomic...

Surface morphology and crystallinity control in the atomic layer deposition (ALD) of hafnium and zirconium oxide thin films

Dennis M. Hausmann, Roy G. Gordon
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Volume:
249
Year:
2003
Language:
english
Pages:
11
DOI:
10.1016/s0022-0248(02)02133-4
File:
PDF, 791 KB
english, 2003
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