Growth of shallow InAs HEMTs with metamorphic buffer

Journal of Crystal Growth 2003 Vol. 251; Iss. 1-4

Growth of shallow InAs HEMTs with metamorphic buffer

Ch. Heyn, S. Mendach, S. Löhr, S. Beyer, S. Schnüll, W. Hansen
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Volume:
251
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0022-0248(02)02404-1
File:
PDF, 308 KB
english, 2003
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