Selective silicon growth on nitride for silicon-plugging...

Journal of Crystal Growth 2003 Vol. 254; Iss. 3-4

Selective silicon growth on nitride for silicon-plugging process in LPCVD

Woo-Seok Cheong, Seok-Kiu Lee, Jae-Sung Roh
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Volume:
254
Year:
2003
Language:
english
Pages:
7
DOI:
10.1016/s0022-0248(03)01192-8
File:
PDF, 811 KB
english, 2003
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