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Global analysis of a small Czochralski furnace with rotating crystal and crucible
You-Rong Li, Yasunobu Akiyama, Nobuyuki Imaishi, Takao TsukadaVolume:
255
Year:
2003
Language:
english
Pages:
12
DOI:
10.1016/s0022-0248(03)01239-9
File:
PDF, 2.35 MB
english, 2003