Control of thin film structure by reactant pressure in...

Control of thin film structure by reactant pressure in atomic layer deposition of TiO2

Jaan Aarik, Aleks Aidla, Väino Sammelselg, Hele Siimon, Teet Uustare
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Volume:
169
Year:
1996
Language:
english
Pages:
7
DOI:
10.1016/s0022-0248(96)00423-x
File:
PDF, 640 KB
english, 1996
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