Heat transfer and mass transport in a multiwafer MOVPE...

Journal of Crystal Growth 1997 Vol. 170; Iss. 1-4

Heat transfer and mass transport in a multiwafer MOVPE reactor: modelling and experimental studies

T. Bergunde, M. Dauelsberg, L. Kadinski, Yu.N. Makarov, M. Weyers, D. Schmitz, G. Strauch, H. Jürgensen
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Volume:
170
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0022-0248(96)00551-9
File:
PDF, 384 KB
english, 1997
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