Carbon delta doping in chemical beam epitaxy using CBr4

Carbon delta doping in chemical beam epitaxy using CBr4

T.B. Joyce, T.J. Bullough, T. Farrell, B.R. Davidson, D.E. Sykes, A. Chew
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Volume:
175-176
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0022-0248(96)00957-8
File:
PDF, 484 KB
english, 1997
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