A new etchant to reveal the subsurface damage on polished...

Journal of Crystal Growth 1997 Vol. 178; Iss. 3

A new etchant to reveal the subsurface damage on polished gallium arsenide substrates

K. Sankaranarayanan, R.R. Sumathi, M. Udhayasankar, P. Jayavel, J. Kumar
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Volume:
178
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0022-0248(96)01189-x
File:
PDF, 483 KB
english, 1997
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