In situ pre-growth calibration using reflectance as a...

In situ pre-growth calibration using reflectance as a control strategy for MOCVD fabrication of device structures

William G. Breiland, Hong Q. Hou, Herman C. Chui, Burrel E. Hammons
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
174
Year:
1997
Language:
english
Pages:
8
DOI:
10.1016/s0022-0248(97)00020-1
File:
PDF, 581 KB
english, 1997
Conversion to is in progress
Conversion to is failed