Reduction of as carryover by PH3 overpressure in...

Journal of Crystal Growth 1997 Vol. 179; Iss. 1-2

Reduction of as carryover by PH3 overpressure in metalorganic vapor-phase epitaxy

Sang-Wan Ryu, Weon Guk Jeong, In Kim, Hee-Dae Kim, Hak-Hwan Kim, Byung-Doo Choe, Seoung-Hwan Park
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Volume:
179
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0022-0248(97)00096-1
File:
PDF, 438 KB
english, 1997
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