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The material quality of CVD-grown SiC using different carbon precursors
C. Hallin, I.G. Ivanov, T. Egilsson, A. Henry, O. Kordina, E. JanzénVolume:
183
Year:
1998
Language:
english
Pages:
12
DOI:
10.1016/s0022-0248(97)00409-0
File:
PDF, 1.95 MB
english, 1998