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High deposition rate parylene films
G.-R. Yang, S. Ganguli, J. Karcz, W.N. Gill, T.-M. LuVolume:
183
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0022-0248(97)00428-4
File:
PDF, 279 KB
english, 1998