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Analysis of Residual Stress Gradient in MEMS Multi-layer Structure
Qian, Jin, Zhao, Ya-Pu, Zhu, Ru-Zeng, Yu, Tong-XiVolume:
3
Language:
english
Journal:
International Journal of Nonlinear Sciences and Numerical Simulation
DOI:
10.1515/ijnsns.2002.3.3-4.727
Date:
January, 2002
File:
PDF, 811 KB
english, 2002