Oxygen concentration in Czochralski silicon crystals depending on silicon monoxide evaporation from boron doped silicon melts
Susumu Maeda, Keisei Abe, Masaki Kato, Hideo Nakanishi, Keigo Hoshikawa, Kazutaka TerashimaVolume:
192
Year:
1998
Language:
english
Pages:
8
DOI:
10.1016/s0022-0248(98)00375-3
File:
PDF, 344 KB
english, 1998