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Study of 4H– and 6H–SiC films grown on off-oriented (0 0 0 1) SiC substrates
V Papaioannou, J Stoemenos, L Di Cioccio, D David, C PuddaVolume:
194
Year:
1998
Language:
english
Pages:
11
DOI:
10.1016/s0022-0248(98)00601-0
File:
PDF, 1.01 MB
english, 1998