Growth of 6H and 4H–SiC by sublimation epitaxy
M. Syväjärvi, R. Yakimova, M. Tuominen, A. Kakanakova-Georgieva, M.F. MacMillan, A. Henry, Q. Wahab, E. JanzénVolume:
197
Year:
1999
Language:
english
Pages:
8
DOI:
10.1016/s0022-0248(98)00890-2
File:
PDF, 523 KB
english, 1999