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High quality GaN film growth on AlN buffer layer, pretreated with alternating pulsative supply of TMG and NH3
Jin Soo Hwang, Satoru Tanaka, Sohachi Iwai, Yoshinobu Aoyagi, Seeyearl SeongVolume:
200
Year:
1999
Language:
english
Pages:
7
DOI:
10.1016/s0022-0248(98)00893-8
File:
PDF, 332 KB
english, 1999