High quality GaN film growth on AlN buffer layer,...

High quality GaN film growth on AlN buffer layer, pretreated with alternating pulsative supply of TMG and NH3

Jin Soo Hwang, Satoru Tanaka, Sohachi Iwai, Yoshinobu Aoyagi, Seeyearl Seong
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Volume:
200
Year:
1999
Language:
english
Pages:
7
DOI:
10.1016/s0022-0248(98)00893-8
File:
PDF, 332 KB
english, 1999
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