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Impurity incorporation during sublimation growth of 6H bulk SiC
D. Schulz, G. Wagner, J. Dolle, K. Irmscher, T. Müller, H.-J. Rost, D. Siche, J. WollweberVolume:
198-199
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0022-0248(98)01038-0
File:
PDF, 98 KB
english, 1999