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Morphology and polytype disturbances in sublimation growth of SiC epitaxial layers
M Syväjärvi, R Yakimova, P.-A Glans, A Henry, M.F MacMillan, L.I Johansson, E JanzénVolume:
198-199
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0022-0248(98)01090-2
File:
PDF, 461 KB
english, 1999