![](/img/cover-not-exists.png)
Gas source molecular beam epitaxy as a multi-wafer epitaxial production technology
Shigekazu Izumi, Yoshiharu Kouji, Norio Hayafuji, Kazuhiko SatoVolume:
201-202
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0022-0248(98)01266-4
File:
PDF, 142 KB
english, 1999