Arsenic-free high-temperature surface cleaning of molecular beam epitxy (MBE)-grown AlGaAs layer with new passivation structure
Kanji Iizuka, Hideharu Watanabe, Toshimasa Suzuki, Hiroshi OkamotoVolume:
201-202
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0022-0248(98)01310-4
File:
PDF, 99 KB
english, 1999