Characterisation of an RF atomic nitrogen plasma source

D Voulot, R.W McCullough, W.R Thompson, D Burns, J Geddes, G.J Cosimini, E Nelson, P.P Chow, J Klaassen

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Volume:

201-202

Year:

1999

Language:

english

Pages:

DOI:

10.1016/s0022-0248(98)01361-x

File:

PDF, 101 KB

english, 1999

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