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Characterisation of an RF atomic nitrogen plasma source
D Voulot, R.W McCullough, W.R Thompson, D Burns, J Geddes, G.J Cosimini, E Nelson, P.P Chow, J KlaassenVolume:
201-202
Year:
1999
Language:
english
Pages:
3
DOI:
10.1016/s0022-0248(98)01361-x
File:
PDF, 101 KB
english, 1999