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Self-limiting growth of InP by alternate trimethylindium and tertiarybutylphosphine supply in ultrahigh vacuum
Nobuyuki Otsuka, Jun-ichi Nishizawa, Hideyuki Kikuchi, Yutaka OyamaVolume:
205
Year:
1999
Language:
english
Pages:
11
DOI:
10.1016/s0022-0248(99)00271-7
File:
PDF, 337 KB
english, 1999